%0 Journal Article
%@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}
%@nexthigherunit 8JMKD3MGPCW/3ESR3H2
%@archivingpolicy denypublisher denyfinaldraft24
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%@resumeid 8JMKD3MGP5W/3C9JHU3
%@usergroup administrator
%@usergroup simone
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%3 SEM and Raman analysis of boron.pdf
%@dissemination WEBSCI; PORTALCAPES.
%X In this work boron-doped diamond (BDD) films were grown on new geometric form substrate. A laser texturized pretreatment on these substrates has promoted a better adherence between film and substrate, and a decrease of diamond total stress. Films morphology, obtained from Scanning Electron Microscopy (SEM) images, have showed that diamond average grain size, between 10-15 mu m, decreased when the boron doping level was increased. For the micro-Raman spectroscopy, spectra analyses performed on each sample have allowed the residual stress evaluation and the diamond purity, from diamond and graphitic Raman peaks shifts. In these films, residual stress increased from 0.2 to 1.2 GPa and diamond purity decreased from 99.6% to 92.6% as the doping level increased. A specific study of morphology, total stress and diamond purity as a function of methane concentration was done for diamond film doped with 10,000 ppm B/C. It was observed a significant increase of grain size and total stress but little variation of diamond purity as methane concentration was increased. All these results gave us support for the use of these devices in different applications.
%8 May
%N 20/21
%T SEM  and Raman analysis of boron-doped diamond coating on spherical textured substrates
%@secondarytype PRE PI
%K spherical boron doped diamond, stress, diamond purity, CHEMICAL-VAPOR-DEPOSITION, X-RAY-DIFFRACTION, CVD DIAMOND, RESIDUAL-STRESSES, THIN-FILMS, ELECTRODES, PRESSURE, GROWTH.
%@group LAS-INPE-MCT-BR
%@group LAS-INPE-MCT-BR
%@secondarykey INPE-13796--PRE/8982
%@copyholder SID/SCD
%@issn 0257-8972
%2 sid.inpe.br/iris@1916/2006/01.30.13.25.35
%@affiliation Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Sensores e Materiais, (INPE, LAS),
%@affiliation Instituto de Química-IQ/USP
%@affiliation Instituto de Química-IQ/USP
%@affiliation Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Sensores e Materiais, (INPE, LAS),
%B Surface and Coatings Technology
%P 5973-5977
%4 sid.inpe.br/iris@1916/2006/01.30.13.25
%@documentstage simone
%D 2006
%V 200
%A Azevedo, Adriana Faria,
%A Barros, R. C. M.,
%A Serrano, S. H. P.,
%A Ferreira, Neidenei Gomes,
%@area FISMAT