%0 Journal Article
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%3 micro-ram.pdf
%@dissemination WEBSCI; PORTALCAPES; COMPENDEX.
%X Residual stress in boron doped diamond films grown on perforated and non-perforated titanium alloy substrates (Ti6Al4V) have been investigated. Diamond films were deposited at 870 K and 6.5 X 10(3) Pa by the conventional hot filament chemical vapor deposition technique (HFCVD) using a gas mixture of methane 1.0 vol.% in hydrogen. For controlling the B/C ratio it was necessary an additional H, line that passed through a bubbler containing B2O3 dissolved in methanol. Large substrates with a geometric area of 12 cm(2) were fixed in a rotation mechanism that improves the film uniformity. Perforated substrates were obtained from laser machining and promoted an increase of approximately 30% on surface geometric area when compared with similar non-perforated sample. Scanning electron microcopy (SEM) has evidenced a faceted polycrystalline grains with orientation (111) and (100) of approximately 1 mum in size for a film thickness of 1.5 mum. From micro-Raman analyses, the stresses were evaluated in many points on samples surface by using the summation method. The contribution of the pure diamond and the non-diamond phases was also analyzed. These results were imperative for comparing the total residual stress in perforated and non-perforated samples and show a good agreement for both of them. Higher compressive stress values are associated with perforated sample that presented lower amount of sp(3) bond. The relative higher concentration of non-diamond phase among the crystalline grains can help the structure relaxing promoting a decrease of intrinsic stress. Total stress result in both samples was compressive but in the samples edges the values are higher due to the thermal component to be a dominant contribution in this region. (C) 2004 Elsevier B.V. All rights reserved.
%8 Mar.
%N 3
%T Micro-Raman spectroscopy for stress analysis on large area diamond/Ti6A14V electrodes
%K doped-diamond, stress, large area, Raman, perforated-electrodes  CVD DIAMOND FILMS, CHEMICAL-VAPOR-DEPOSITION, X-RAY-DIFFRACTION, THIN-FILMS, TITANIUM-ALLOYS, RESIDUAL-STRESS, WATER-TREATMENT, TI-6AL-4V, ADHESION, COATINGS.
%@secondarytype PRE PI
%@group LAS-INPE-MCT-BR
%@copyholder SID/SCD
%@secondarykey INPE-11797-PRE/7153
%@issn 0925-9635
%2 sid.inpe.br/marciana/2004/12.09.15.54.42
%@affiliation Diniz AV (reprint author), INPE, Sao Jose Dos Campos, BR-12245970 Brazil,
%@affiliation INPE, Sao Jose Dos Campos, BR-12245970 Brazil,
%@affiliation CTA, ITA, Dept Quim, Sao Jose Dos Campos, BR-12225800 Brazil,
%@affiliation CTA, AMR, Div Mat, Sao Jose Dos Campos, BR-12228904 Brazil,
%B Diamond and Related Materials
%@language English
%P 526-532
%4 sid.inpe.br/marciana/2004/12.09.15.54
%D 2004
%V 13
%A Diniz, Alessandra Venâncio,
%A Ferreira, Neidenei Gomes,
%A Corat, Evaldo Jose,
%A Trava-Airoldi, Vladimir Jesus,
%@area FISMAT